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GaN compound semiconductors,
both electro-optical (LEDs,VCELs, etc.) and electronic
ICs, are understood to be the next generation
of higher performance solid-sate capability. In
electronic applications this means new types of
MOSFETs, Memories, Bipolar ICs, Power ICs, RF,
Microwave and Milimeterwave devices, to name a
few, that will work faster, in harsher conditions,
with more bandwidth, more efficiently and with
lower power. In the LED industry it means the
advent of High Brightness low wavelength devices
that will be applied to markets and product applications
heretofore totally unattainable, including digitally
compatible general “White ”lighting and big screen
full-color solid-state outdoor video displays.
GaN is the only crystal, the
fundamental ingredient of a semiconductor, with
bandgap characteristics specifically advantageous
for many visible short wavelength and ultraviolet
LED applications. Bulk GaN cannot be grown by
itself as a semiconductor crystal in a cost-effective
manner yet, mostly because of physical constraints.
Indeed, a major difficulty in growing high-quality
GaN crystalline films was in establishing a suitable
substrate material.
GaN was first successfully produced for High
Brightness LEDs via MOCVD epitaxy on Al2O3 (Sapphire)
and this combination continues today in large
scale production from an increasing supplier base.
Subsequently, GaN LEDs have also been produced
on SiC (Silicon carbide) substrates as well and
are currently in large scale production, albeit
with somewhat lower brightness results. Other
materials as well, each selected by device designers
(both photonic and/or electronic) that base their
selection upon the individual materials ’physical
properties, are also in development for both LEDs
and electronic components. For High Brightness
LEDs, the current production platforms are Sapphire
and Silicon Carbide, which are compared in the
following table:
|
Parameter
|
Sapphire
|
Silicon
Carbide
|
| Chemical Formula |
Al2O3
|
SiC
|
| Symmetry |
Rhombohedral,C3V
|
Hexagonal,C6V
|
| C-Axis Lattice Constant,A |
12.99
|
15.117
|
| a-Axis Lattice Constant,
A |
4.758
|
3.08
|
| Density, g/mm3 |
3.98
|
3.21
|
| Hardness, Mohs |
9
|
9.5
|
| Young Modulus @ 20ºC, Gpa |
0.4
|
488
|
| Tensile Strength @ 20ºC,
Gpa |
0.12
|
192
|
| Melting Point, ºC |
2050
|
2850
|
| Specific Heat, cal/g @ 20ºC |
0.16
|
0.16
|
| Heat Capacitance, cal/molºK |
16.32
|
6.4
|
| Thermal Conductivity, W/mºK |
41.2
|
490
|
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Thermal Expansion:
- Parallel to C–Axis:
- Perpendicular to C-Axis:
|
8.5
7.5
|
4.2
4.68
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What goes into the selection of
any material for any given semiconductor application
are the basic material properties cited above
in conjunction with the specific material required
for deposition and crystal growth. In addition,
other factors not cited above and exhibited by
the substrate materials or based upon observation
and/or development of various fabrication processes,
also play a key part in substrate or superstrate
material selection. III-V nitride semiconductors,
such as InGaN, exhibit wurtzite (hexagonal lattice)
crystal structure with tetrahedral bonding to
next neighbors and a direct energy bandgap particularly
useful for LEDs in the short wavelength regions.
While SiC has a lattice mismatch to GaN of 3.5%,
and between Al2O3 the mismatch
is 13%, the mismatch, combined with differences
in thermal expansion, was resolved by buffer layer
deposition processes now used in large scale production.
Other undesirable factors too have been reviewed
and work-arounds implemented to resolve them,
creating very effective results especially in
LEDs. Additional observations, that have been
part of this High Brightness LED semi-conductor
design engineering process, are listed below:
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Al2O3
- Insulating material,
requires planar circuitry, needs larger
die size and redesigned conventional,
traditional package mechanicals for best
results.
- Cost-effective, commonly
available, in mass production worldwide
- Won’t melt until 2050ºC,
maintains High Temp Excellent cryogenic
conductivity, provides rapid heating and
cooling
- High process survival,
scratch resistant, thin material required
for equivalent strength, zero porosity,
chemically inert
- Fully transparent media,
transmits ultraviolet, visible, infrared
and microwaves
- Low dielectric loss,
low dielectric loss: Tan (<104 15%
lattice mismatch to GaN and expansion
characteristics) accommodated by a buffer
layer
- GaN crystal lattice under
compression
- Poorer heat transfer
(4x worse than SiC) somewhat mitigated
by use of very thin wafers which are acceptable
due to materials good modulus of elasticity
the thinner it is.
- Excellent for superstrate
“flip-chip” configuration
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SiC
- Conducting substrate
enables backside contactsamenable to use
in traditional, conventional packages
and minimized die size.
- Higher cost material
with less availability
- Thermally stable with
high thermal conductivity, chemically
impervious, mechanically stable.
- Only wide bandgap (WBG)
semiconductor that possess native oxide
suitable for MOS insulator in electronic
devices (oxidation produces SiO2)
- The breakdown field in
SiC is about 8X higher than in Silicon
(important for high-voltage power ICs)
- With WBG thermal generation
of electron-hole pairs is much lower at
any temperature (excellent for memories
such as DRAMs)
- GaN crystal lattice under
tension
- Micropipe densities (MPD)
range from .5/cm2 to a typical
25 – 50/cm2 , which impact
yields and reliability
- Does not lend itself
well to development of “flip-chip” configuration
- SiC absorbs short wavelength
light (greater than or equal to 400 nm)
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Others Substrates: Silicon, Diamond, Gallium
Nitride, GaAs, ZnO, Spinel (MgAl2O4),
Lithium Gallium Oxide and other materials have
been used to work with GaN or are in development.
Some of this work encompasses LEDs. The potential
for homoepitaxy with GaN wafer substrates would
virtually eliminate lattice mismatch characteristics,
for example, and is under development at many
centers throughout the world. ZnO provides only
a 2.2% lattice mismatch with GaN and is matched
with InGaN. InGaN/ZnO, as well, is being worked
with for use in LEDs by yet another cadre of research
centers, both public and private.
Each material type posses unique combinations
of physical, mechanical, chemical, thermal, electrical,
optical, availability and economic characteristics.
Frequently it is the combination of three or more
of a materials' characteristics that make it the
material of choice for a given semiconductor application.
Electronic ICs, such as a Power FET, or an optoelectronic
device such as a UV Photodetector, have different
design criteria, hence different material combinations
for each of them may provide the most optimum
result. Research and improvements will continue
to be pursued with breakthroughs established and
used along the way.
UNIROYAL is unique in its business
and technical approach to GaN, and its product
implementation work, which includes: high volume
production of InGaN/Al2O3
LEDs at UNIROYAL Optoelectronics, and the high
volume production of 6H &4H SiC substrates, SiC
Epitaxial products and is conducting work supplying
fabricated digital, analog and high-frequency
electronic devices at UNIROYAL Sterling Semiconductors.
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